Silicon Nanohole(硅纳米孔)研究综述
Silicon Nanohole 硅纳米孔 - The fabrication of silicon nanohole (SiNH) using a combination of electron beam lithography (EBL) and reactive ion etching (RIE) processes is reported. [1] Herein, an improved graphene/Si detector with excellent light absorption performance is proposed and demonstrated by directly growing graphene on the surface of silicon nanoholes (SiNHs). [2] First, silicon nanoholes (SiNHs) are well known as effective structures to reduce solar cell reflectance and enhance light harvesting. [3]报道了使用电子束光刻 (EBL) 和反应离子蚀刻 (RIE) 工艺相结合的硅纳米孔 (SiNH) 的制造。 [1] 在此,通过在硅纳米孔(SiNHs)表面直接生长石墨烯,提出并证明了一种具有优异光吸收性能的改进石墨烯/硅探测器。 [2] 首先,众所周知,硅纳米孔 (SiNH) 是降低太阳能电池反射率和增强光收集的有效结构。 [3]