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Spin-Spray Deposition of Spin on Glass Using MEMS Atomizer


Vibrating Mesh Atomizer for Spin-Spray Deposition

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10.1109/Transducers50396.2021.9495619

Analysis of Quadrature and Frequency Split in a Mems Vibrating Ring Gyroscope with Structural Imperfections


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10.1109/MEMS51782.2021.9375431

A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry


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10.1109/MEMS51782.2021.9375169

Spin-Spray Deposition of Spin on Glass Using MEMS Atomizer



Vibrating Mesh Atomizer for Spin-Spray Deposition



Analysis of imperfections sensitivity and vibration immunity of MEMS vibrating wheel gyroscope


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10.1109/ITHERM.2019.8757355

Temperature Change Leverage on Performance of MEMS Rotational Motion Sensors


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Mems Vibrating 振动


Mems Vibrating 振动
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