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10.23919/ICEP.2019.8733588

The analytical results proved that the E-VUV process was applicable to PEEK-and tin-polyimide bonding, and the bonded interfaces are expected to be robust enough for flexible MEMS packaging.

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10.1109/TED.2019.2949632

Obviously, the deformation of flexible substrate inevitably affects the performance of flexible MEMS devices.

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Flexible Mems

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Dec 12, 2024

What is/are Flexible Mems?

Flexible Mems - The analytical results proved that the E-VUV process was applicable to PEEK-and tin-polyimide bonding, and the bonded interfaces are expected to be robust enough for flexible MEMS packaging. ^[1] Obviously, the deformation of flexible substrate inevitably affects the performance of flexible MEMS devices. ^[2]