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Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime


Multi Frequency Acoustic Emission Micromachined Transducers for Structural Health Monitoring


Enhancing the Output Charge Density of Triboelectric Nanogenerator via Building Charge Blocking Layer



A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones


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10.1109/Transducers50396.2021.9495551

Continuously Tunable Silicon Photonic MEMS $2 \times 2$ Power Coupler


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