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An Antenna-Shaped MEMS Tactile Sensor with Angle Detection Capability


CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement

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10.1109/MEMS51782.2021.9375281

An Antenna-Shaped MEMS Tactile Sensor with Angle Detection Capability



CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement



Electric Modulation on the Sensitivity and Sensing Range of CMOS-MEMS Tactile Sensor by Using the PDMS Elastomer Fill-In


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10.1109/Transducers50396.2021.9495407

A Comparative Evaluation of a Wearable MEMS Tactile Sensors Array and a Photoplethysmography Sensor for Atrial Fibrillation Detection Under Sitting Condition


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10.1109/MEMS51782.2021.9375453

Mems-Based “Multi-Tactile Scanner” With 100μm Spatial Resolution of Hardness


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10.1109/TRANSDUCERS.2019.8808646

Tactile Sensor Using Microcantilever Embedded in Fluoropolymer for Water and Ethanol Resistance


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10.1109/TRANSDUCERS.2019.8808608

In-Process And In-Use Modulation Of Sensitivity And Sensing Range For CMOS-MEMS Tactile Sensor With Dielectric PDMS Nanocomposite


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10.1109/SENSORS43011.2019.8956814

Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface


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