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AI Assisted Optimization of Unimorph Tapered Cantilever for Piezoelectric Energy Harvesting


Development of algorithms in open-source Elmer FEM for frequency response and biased modal analysis of MEMS cantilever

Mems Structures sentence examples within Release Mems Structures



Sacrificial grid release technology: a versatile release concept for MEMS structures


Composition of Metal Layers in CMOS-MEMS Micromachining Process


Modeling Material Nonlinearities in Piezoelectric Films: Quasi-Static Actuation


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10.1016/J.ENGFAILANAL.2021.105563

Transferability of weakest link model parameters of polysilicon from indentation fracture to failure of MEMS structures



Adhesive Deposition Process Characterization for Microstructure Assembly



Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls



Highly sensitive MEMS magnetic field sensors with integrated powder-based permanent magnets



Development of an illumination module for stroboscopic phase-shift interferometry on MEMS devices


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10.1109/TRANSDUCERS.2019.8808404

Threshold-Triggered Mems-Cmos Infrared Resonant Detector with Near-Zero Standby Power Consumption



Influence of laser structuring and barium nitrate treatment on morphology and electrophysical characteristics of vertically aligned carbon nanotube arrays



Piezoelectric films for MEMS applications (Conference Presentation)



Room-Temperature Terahertz Antenna-Coupled Microbolometers with Titanium Thermistor and Heater



Method of Analyzing Dynamic Characteristics of MEMS Gyroscopes in Test Measurement Mode



Improve the Reliability and Increased Lifetime of Comb Drive Structure in RF MEMS Switch



A Tester of the MEMS Accelerometers Operation Modes



A MEMS Vibratory Energy Harvester Charged by an Off-Chip Electret



A new model for permanent flexural deflection of cantilever MEMS actuator by conventional mechanism-based strain gradient plasticity framework



Integral Microaccelerometer Based on GaAs/InAs


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10.1109/PIERS-Spring46901.2019.9017218

Magnetoelectric Current Sensor Based on MEMS Technology



Mechanical Test Structures for the Determination of Normal Stress in Multilayer Freestanding MEMS-Membranes


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