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GaAs-based microelectromechanical terahertz bolometers fabricated on high-resistivity Si substrates using wafer bonding technique

Fast and sensitive bolometric terahertz detection at room temperature through thermomechanical transduction

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Terahertz MEMS bolometers with enhanced thermal sensitivity by phononic crystal structures

Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors

Enhanced thermal sensitivity of MEMS bolometers integrated with two-dimensional phononic crystals

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Suppressing beam deflections by introducing phosphorous in the GaAs-based terahertz MEMS bolometers

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