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GaAs-based microelectromechanical terahertz bolometers fabricated on high-resistivity Si substrates using wafer bonding technique


Fast and sensitive bolometric terahertz detection at room temperature through thermomechanical transduction

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10.1109/IRMMW-THz50926.2021.9567302

Terahertz MEMS bolometers with enhanced thermal sensitivity by phononic crystal structures



Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors



Enhanced thermal sensitivity of MEMS bolometers integrated with two-dimensional phononic crystals


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10.1109/ICIPRM.2019.8819215

Suppressing beam deflections by introducing phosphorous in the GaAs-based terahertz MEMS bolometers


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