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10.1109/ISAF51943.2021.9477364

Pulse-induced vibration modes and their natural frequencies were analytically investigated on buckled diaphragm structures that enhance the sensitivity of piezoelectric ultrasonic microsensors.

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10.1109/ISAF51943.2021.9477373

Sensitivity of ultrasonic microsensors on piezoelectric diaphragm structure is enhanced by an adequate buckling of the diaphragm caused by the stress combination of the multilayered structure.

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Ultrasonic Microsensors

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Oct 09, 2024

What is/are Ultrasonic Microsensors?

Ultrasonic Microsensors - Pulse-induced vibration modes and their natural frequencies were analytically investigated on buckled diaphragm structures that enhance the sensitivity of piezoelectric ultrasonic microsensors. ^[1] Sensitivity of ultrasonic microsensors on piezoelectric diaphragm structure is enhanced by an adequate buckling of the diaphragm caused by the stress combination of the multilayered structure. ^[2]