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Bistable Mems Membranes 10.1016/j.sna.2019.111576

This paper reports on a novel measurement concept for the 3D characterisation of bistable MEMS membranes with an integrated piezoelectric thin film actuator to stimulate the switching between the two ground states.

Bistable Mems Membranes 10.1088/1361-6439/AB3185

In this paper we report on the fabrication of bistable MEMS membranes with diameters in the range of 600 to 800 µm, a total thickness of 3.

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10.1117/12.2577848

(1) Imaging of vibration modes of MEMS membranes.

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10.1016/j.sna.2019.111576

This paper reports on a novel measurement concept for the 3D characterisation of bistable MEMS membranes with an integrated piezoelectric thin film actuator to stimulate the switching between the two ground states.

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10.1088/1361-6439/AB3185

In this paper we report on the fabrication of bistable MEMS membranes with diameters in the range of 600 to 800 µm, a total thickness of 3.

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10.1109/TRANSDUCERS.2019.8808203

This work reports on a novel concept for switching between the two stable states of compressively pre-stressed bistable MEMS membranes using integrated piezoelectric scandium aluminum nitride (ScxAlN1-x) thin film actuators.

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Mems Membranes

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Oct 06, 2024

What is/are Mems Membranes?

Mems Membranes - (1) Imaging of vibration modes of MEMS membranes. ^[1] This paper reports on a novel measurement concept for the 3D characterisation of bistable MEMS membranes with an integrated piezoelectric thin film actuator to stimulate the switching between the two ground states. ^[2] In this paper we report on the fabrication of bistable MEMS membranes with diameters in the range of 600 to 800 µm, a total thickness of 3. ^[3] This work reports on a novel concept for switching between the two stable states of compressively pre-stressed bistable MEMS membranes using integrated piezoelectric scandium aluminum nitride (ScxAlN1-x) thin film actuators. ^[4]

Bistable Mems Membranes

This paper reports on a novel measurement concept for the 3D characterisation of bistable MEMS membranes with an integrated piezoelectric thin film actuator to stimulate the switching between the two ground states. ^[1] In this paper we report on the fabrication of bistable MEMS membranes with diameters in the range of 600 to 800 µm, a total thickness of 3. ^[2] This work reports on a novel concept for switching between the two stable states of compressively pre-stressed bistable MEMS membranes using integrated piezoelectric scandium aluminum nitride (ScxAlN1-x) thin film actuators. ^[3]