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10.1109/icton.2019.8840522

In this invited talk, we will present some recent progresses on wafer scale integration of GaAs, InP, InAs and GaSb thin film templates on Si substrates using innovative smart cutting by ion implantation, wafer bonding, splitting and surface treatment.

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10.1016/J.JCRYSGRO.2018.11.026

7Sb multiple-quantum-well (MQW) structure on a two-inch Si(1 0 0) substrate using a 100-nm-thick heteroepitaxial GaSb thin-film buffer with a nucleation layer of GaSb dots by molecular beam epitaxy (MBE) and evaluated the surface morphology and the photoluminescence (PL) and X-ray diffraction spectra of the MQW structure.

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Gasb Thin

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Dec 04, 2024

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Gasb Thin - In this invited talk, we will present some recent progresses on wafer scale integration of GaAs, InP, InAs and GaSb thin film templates on Si substrates using innovative smart cutting by ion implantation, wafer bonding, splitting and surface treatment. ^[1] 7Sb multiple-quantum-well (MQW) structure on a two-inch Si(1 0 0) substrate using a 100-nm-thick heteroepitaxial GaSb thin-film buffer with a nucleation layer of GaSb dots by molecular beam epitaxy (MBE) and evaluated the surface morphology and the photoluminescence (PL) and X-ray diffraction spectra of the MQW structure. ^[2]